Central Innovation Program for SMEs: Cooperations (ZIM) (Archive)
 | New methods of measurements for the development of materials (>> more) Project Head: D. Hömberg October 1, 2009 - October 31, 2011 |
| Grating simulation in field tracing Project Head: B. Schmidt March 1, 2012 - February 28, 2014 |
 | Development of hybride scattering-matrix algorithms for the metrology of surface structures in etch processes (>> more) Project Head: A. Rathsfeld May 1, 2015 - June 30, 2017 |