Andreas RathsfeldWeierstraß-Institut für Angewandte Analysis und Stochastikim Forschungsverbund Berlin e.V. FG4: Nichtlineare Optimierung und Inverse Probleme Mohrenstr. 39 10117 Berlin
Sitz: Mohrenstr. 39, Raum 506
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Arbeitsgebiet
Modellierung und Optimierung mikrooptischer Oberflächenstrukturen
Interessengebiete
- Randelementmethoden
- Waveletalgorithmen
- Beugung an periodischen Gittern
- Gitteroptimierung
- Scatterometrie
Publikationen
Vorträge
- Braunschweig, 245th Seminar on Scatterometry and Ellipsometry on Structured Surfaces, 2009: Modelling and Algorithms for Simulation and Reconstruction in Scatterometry
- Workshop on Inverse Problems for Waves, Methods and Applications, École Polytechnique, 2010: Numerical reconstruction of elastic obstacles from the far-field data of scattered acoustic waves
- Antalya, 6th International Conference, Inverse Problems, Modeling and Simulation, 2012: Inverse Problems for the Scatterometric Measuring of Grating Structures
Poster
- Diffractive Optics 2003, Oxford: Simulation, Optimization, and Reconstruction of Diffractive Structures
- SCEE 2012, Zürich: Numerical Solution for Scattering by Biperiodic Gratings Using FEM Coupled by Fourier-Mode Expansions
Letzte Modifikation: 7.Febr. 2013 von Andreas.Rathsfeld@wias-berlin.de
URL: http://www.wias-berlin.de/people/rathsfel/