Leibniz MMS Days 2020 - Abstract

Miller, Wolfram

Kinetic Monte Carlo Simulations of Ga2O3 homoepitaxy

A Kinetic Monte Carlo method was developed, which reflects the structure of Ga2O3. The specific programme structure will be explained. We obtained different growth modes dependent on the process parameters very similar to the results of the experiments. This comprises 2D island growth, step flow growth, and step bunching. Challenges of the computational method will be discussed.